Vacuum Linear Motors

HIWIN vacuum linear motors provide a variety of models, considering the low outgassing rate of vacuum applications, and can be applied to high vacuum environments of 10-8 mbar. The exclusive magnetic shielding design can be customized to effectively avoid magnetic field interference, and ensure stability for Electron beam applications for semiconductors. HIWIN can also customize vacuum motor according to customer needs to achieve higher force density.

  •  For high vacuum applications up to 10-8mbar
  •  Customized Magnetic Shielding Function
  •  Customized cleaning and outgassing rate testing services
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